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Discharged Bankrupt Glow Discharge Processes: Sputtering and Plasma Etching by Brian Chapman, X Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Glow Discharge Plasmas in Analytical Spectroscopy by Kenneth Marcus, This multi-author, edited volume includes chapters which deal with both basic and highly complex applications. Glow discharge devices are now being used in very novel ways for the analysis of liquids and gases, including molecular species detection and identification, an area that was beyond the perceived scope of applicability just ten years ago. It is expected that the next decade will see a growth in the interest and application of glow discharge devices far surpassing the expectations of the last century.
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